The Heidelberg Instruments DWL 66+ Direct-Write Laser Lithography System is one of the most versatile and high-resolution maskless lithography systems available today. Designed for advanced research, prototyping, and microfabrication, the DWL 66+ enables scientists and engineers to create extremely precise microstructures without the need for physical photomasks.
This powerful system supports a wide range of applications including MEMS, microelectronics, microfluidics, photonics, sensors, optics, photovoltaics, material science, and quantum device research. By combining high-resolution patterning with advanced grayscale exposure capabilities, the DWL 66+ allows researchers to fabricate complex microstructures with exceptional accuracy and surface quality.
The system features Write Mode XR, delivering a minimum feature size of 200 nm, making it one of the highest-resolution direct-write laser lithography tools on the market. Its advanced grayscale lithography supports up to 65,536 exposure levels, enabling the creation of smooth 3D and high-aspect-ratio microstructures in thick photoresists.
Unlike traditional mask aligners, the DWL 66+ uses digital pattern data, allowing instant design modifications without the need for photomasks. This dramatically reduces development time, eliminates mask costs, and improves workflow efficiency for R&D laboratories and semiconductor development facilities.
The DWL 66+ also integrates industrial-grade stability technologies, including interferometric positioning control, real-time autofocus systems, and a controlled laminar airflow environment to maintain thermal stability and minimize contamination during exposures.
With its modular configuration, automated alignment options, and high-precision optics, the DWL 66+ provides a reliable solution for laboratories seeking high-quality microfabrication and fast prototyping.
Labindia Instruments Pvt. Ltd. is the authorised dealer in India for Heidelberg Instruments lithography systems, providing advanced microfabrication solutions for research institutions, semiconductor labs, and nanotechnology centers.
